The 2Mix device can be built with support for corrosive gases. This option comes with stainless steel gas connections and different type mass flow controllers inside (MFC).
The MFC accuracy is less than in the standard model: ± 0.4% of reading and ± 0.2% of full scale, and the MFC turndown ratio is down from 1 to 10000 to 1 to 100.
List of supported corrosive gases:
Short Name | Long Name / Composition |
|---|---|
NO | Nitric Oxide |
NF3 | Nitrogen Trifluoride |
NH3 | Ammonia |
Cl2 | Chlorine |
H2S | Hydrogen Sulfide |
SO2 | Sulfur Dioxide |
SiH4 | Silane |
R-11 | Trichlorofluoromethane (CCl3F) |
R-115 | Chloropentafluoroethane (C2ClF5) |
R-116 | Hexafluoroethane (C2F6) |
R-124 | Chlorotetrafluoroethane (C2HClF4) |
R-125 | Pentafluoroethane (CF3CHF2) |
R-134A | Tetrafluoroethane (CH2FCF3) |
R-14 | Tetrafluoromethane (CF4) |
R-142b | Chlorodifluoroethane (CH3CClF2) |
R-143a | Trifluoroethane (C2H3F3) |
R-152a | Difluoroethane (C2H4F2) |
R-22 | Difluoronochloromethane (CHClF2) |
R-23 | Trifluoromethane (CHF3) |
R-32 | Difluoromethane (CH2F2) |
R-318 | Octafluorocyclobutane (C4F8) |
R-404A | 44% R-125, 4% R-134A, 52% R-143A |
R-407C | 23% R-32, 25% R-125, 52% R-134A |
R-410A | 50% R-32, 50% R-125 |
R-507A | 50% R-125, 50% R-143A |
